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363 pages • missing pub info (view editions)
ISBN/UID: 9780471316718
Format: Hardcover
Language: English
Publisher: Wiley-Interscience
Edition Pub Date: 22 March 2002
Description
The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition...
Community Reviews
Content Warnings
363 pages • missing pub info (view editions)
ISBN/UID: 9780471316718
Format: Hardcover
Language: English
Publisher: Wiley-Interscience
Edition Pub Date: 22 March 2002
Description
The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition...
Community Reviews
Content Warnings