Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology by
Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology

Lecture Notes in Computer Science

Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology

159 pages paperback

2 editions

nonfiction art science technology informative medium-paced
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Description

The present book collects a broad overview of chemical and physical char- acteristics of silicon oxynitrides. Special emphasis is put on the way in which these properties influence the electrical characteristics and behaviour of this important mat...

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