Fundamental Principles of Optical Lithography: The Science of Microfabrication by Chris Mack
Fundamental Principles of Optical Lithography: The Science of Microfabrication
—
Chris Mack
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Fundamental Principles of Optical Lithography: The Science of Microfabrication

Chris Mack

515 pages • first pub 2008 (view editions)

challenging informative medium-paced
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Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook....

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