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24 pages • paperback • 1 edition
ISBN/UID: 9781287291428
Format: Paperback
Language: English
Publisher: Bibliogov
Edition Pub Date: 07 Aug 2013
Description
A differential sputter yield measurement technique is described, which consists of a quartz crystal monitor that is swept at constant radial distance from a small target region where a high current density xenon ion beam is aimed. This apparatus h...
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Content Warnings
24 pages • paperback
ISBN/UID: 9781287291428
Format: Paperback
Language: English
Publisher: Bibliogov
Edition Pub Date: 07 Aug 2013
Description
A differential sputter yield measurement technique is described, which consists of a quartz crystal monitor that is swept at constant radial distance from a small target region where a high current density xenon ion beam is aimed. This apparatus h...
Community Reviews
Content Warnings