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Book Information
272 pages • paperback • 2 editions
ISBN/UID: 9781849967044
Format: Paperback
Language: English
Publisher: Springer
Edition Pub Date: 21 Oct 2010
Description
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate me...
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Content Warnings
272 pages • paperback
ISBN/UID: 9781849967044
Format: Paperback
Language: English
Publisher: Springer
Edition Pub Date: 21 Oct 2010
Description
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate me...
Community Reviews
Content Warnings