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Book Information
159 pages • paperback • 2 editions
ISBN/UID: 9783540539544
Format: Paperback
Language: English
Publisher: Springer
Edition Pub Date: 28 May 1991
Description
The present book collects a broad overview of chemical and physical char- acteristics of silicon oxynitrides. Special emphasis is put on the way in which these properties influence the electrical characteristics and behaviour of this important mat...
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159 pages • paperback
ISBN/UID: 9783540539544
Format: Paperback
Language: English
Publisher: Springer
Edition Pub Date: 28 May 1991
Description
The present book collects a broad overview of chemical and physical char- acteristics of silicon oxynitrides. Special emphasis is put on the way in which these properties influence the electrical characteristics and behaviour of this important mat...