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Book Information
272 pages • hardcover • 2 editions
ISBN/UID: 9781848000209
Format: Hardcover
Language: English
Publisher: Springer
Edition Pub Date: 01 Jan 2008
Description
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate me...
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Content Warnings
272 pages • hardcover
ISBN/UID: 9781848000209
Format: Hardcover
Language: English
Publisher: Springer
Edition Pub Date: 01 Jan 2008
Description
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate me...
Community Reviews
Content Warnings