Etching of Wide-Bandgap Chemically Resistant Semiconductors by John Kelly, Dennis Van Dorp

Etching of Wide-Bandgap Chemically Resistant Semiconductors

John Kelly, Dennis Van Dorp

160 pages missing pub info (view editions)

nonfiction science
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Silicon carbide (SiC) and gallium nitride (GaN) are believed to be ideal materials for the fabrication of electronic devices that can operate at high power levels, temperatures, and frequencies, because they exhibit a larger bandgap, higher breakd...

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